Fluids cannot generally be pulled, so a vacuum cannot be created by suction. Suction can spread and dilute a vacuum by letting a higher pressure push fluids into it, but the vacuum has to be created first before suction can occur. The easiest way to create an artificial vacuum is to expand the volume of a container. For example, the diaphragm muscle expands the chest cavity, which causes the volume of the lungs to increase. This expansion reduces the pressure and creates a partial vacuum, which is soon filled by air pushed in by atmospheric pressure.
To continue evacuating a chamber indefinitely without requiring infinite growth, a compartment of the vacuum can be repeatedly closed off, exhausted, and expanded again. This is the principle behind positive displacement pumps, like the manual water pump for example. Inside the pump, a mechanism expands a small sealed cavity to create a vacuum. Because of the pressure differential, some fluid from the chamber (or the well, in our example) is pushed into the pump's small cavity. The pump's cavity is then sealed from the chamber, opened to the atmosphere, and squeezed back to a minute size.
The above explanation is merely a simple introduction to vacuum pumping, and is not representative of the entire range of pumps in use. Many variations of the positive displacement pump have been developed, and many other pump designs rely on fundamentally different principles. Momentum transfer pumps, which bear some similarities to dynamic pumps used at higher pressures, can achieve much higher quality vacuums than positive displacement pumps. Entrapment pumps can capture gases in a solid or absorbed state, often with no moving parts, no seals and no vibration. None of these pumps are universal; each type has important performance limitations. They all share a difficulty in pumping low molecular weight gases, especially hydrogen, helium, and neon.
The lowest pressure that can be attained in a system is also dependent on many things other than the nature of the pumps. Multiple pumps may be connected in series, called stages, to achieve higher vacuums. The choice of seals, chamber geometry, materials, and pump-down procedures will all have an impact. Collectively, these are called vacuum technique. And sometimes, the final pressure is not the only relevant characteristic. Pumping systems differ in oil contamination, vibration, preferential pumping of certain gases, pump-down speeds, intermittent duty cycle, reliability, or tolerance to high leakage rates.
In ultra high vacuum systems, some very "odd" leakage paths and outgassing sources must be considered. The water absorption of aluminiumand palladium becomes an unacceptable source of outgassing, and even the adsorptivity of hard metals such as stainless steel or titaniummust be considered. Some oils and greases will boil off in extreme vacuums. The permeability of the metallic chamber walls may have to be considered, and the grain direction of the metallic flanges should be parallel to the flange face.
The lowest pressures currently achievable in laboratory are about 1×10−13 torrs (13 pPa).[43] However, pressures as low as 5×10−17 torrs (6.7 fPa) have been indirectly measured in a 4 K (−269.15 °C; −452.47 °F) cryogenic vacuum system.[4] This corresponds to ≈100 particles/cm3.
Source: Wikipedia
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